US Patent 10429737 Antireflective compositions with thermal acid generators
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Patent abstract
New methods and substrates are provided that include antireflective compositions that comprise one or more thermal acid generators.
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Patent Citations Received
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Patent Jurisdiction
Patent Number
104297370
Date of Patent
October 1, 2019
0Patent Application Number
157118470
Date Filed
September 21, 2017
0Patent Primary Examiner
Edits on 25 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
104297370
Date of Patent
October 1, 2019
0Patent Application Number
157118470
Date Filed
September 21, 2017
0Patent Primary Examiner
Edits on 29 Jan, 2022
Golden AI
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US Patent 10429737 Antireflective compositions with thermal acid generators
Infobox
Is a
Patent jurisdiction
Patent number
10429737
Date of patent
October 1, 2019
Patent application number
15711847
Date Filed
September 21, 2017
Patent primary examiner
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