Patent attributes
Global shutter imaging pixels may include a charge storage region that receives charge from a respective photodiode. Global shutter imaging pixels may be formed as frontside illuminated imaging pixels or backside illuminated imaging pixels. Shielding charge storage regions from incident light may be important for image sensor performance. To shield charge storage regions in backside illuminated global shutter imaging pixels, shielding structures may be included over the charge storage region. The shielding structures may include backside trench isolation structures, a metal layer formed in a backside trench between backside trench isolation structures, and frontside deep trench isolation structures. The metal layer may have angled portions that reflect light towards the photodiodes.
