US Patent 10437083 Individually addressable infrared mask array

A mask array apparatus includes a monolithic structure that includes a substrate layer transmissive for at least a portion of an infrared wavelength band and an array of individually addressed pixel structures. Each pixel structure is in stacked relation above or below the substrate layer, and includes at least one micro-plate heating element layer, circuitry, and at least one phase change material (PCM) element. The heating element layer is transmissive for the wavelength band, and has switchable on and off states configured to produce temperature changes. The circuitry is configured to individually address the heating element layer, separately from heating element layers in other pixel structures, to switch the heating element layer between the on and off states. The PCM is in stacked relation above or below the heating element layer and configured to change transmissive states in the wavelength band in response to the temperature changes.