Patent attributes
A VCSEL is described that provides for emission from the substrate side. The VCSEL comprises a substrate having first and second major surfaces, a first distributed Bragg reflector (DBR) on the first major surface of the substrate, an active region on the first DBR, and a second DBR on the active region. These elements are aligned on a longitudinal axis along which laser radiation is emitted. In an illustrative embodiment of the invention, an open region extends through the substrate along the longitudinal axis between the second major surface of the substrate and the first DBR. An anti-reflection coating and a first ohmic contact are located on the first DBR in this region. Preferably the first ohmic contact extends around all or part of the anti-reflection coating. A second ohmic contact is located on the surface of the second DBR. The two DBRs form a laser cavity; and emission takes place along the longitudinal axis through the anti-reflection coating. A method for forming the VCSEL is also described.
