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Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Dirk Ewoud Boonzajer Flaes0
Kjeld Sijbrand Eduard Eikema0
Stefan Michiel Witte0
Date of Patent
October 29, 2019
0Patent Application Number
154530490
Date Filed
March 8, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In an inspection apparatus, a target on the surface is illuminated with illuminating radiation that comprises first and second illuminating components. The illuminating components form one or more periodic illuminating patterns on the surface. A plurality of scattered radiation patterns formed by the illuminating radiation after scattering by the target is captured at a detector for a number of values of a controllable characteristic of at least one of the illuminating components. The captured radiation is then used to reconstruct data describing the target.
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