Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yen-Shuo Su0
Chun-Tsung Kuo0
Jiech-Fun Lu0
Date of Patent
October 29, 2019
0Patent Application Number
158802890
Date Filed
January 25, 2018
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for fabricating a magnetic core includes depositing a magnetic layer on a dielectric layer, forming a first photoresist layer on the magnetic layer and patterning the first photoresist layer, etching the magnetic layer through the patterned first photoresist layer, in which a first section of the magnetic layer exposed by the first photoresist layer remains on the dielectric layer after the magnetic layer is etched, removing the patterned first photoresist layer, forming a second photoresist layer on the magnetic layer and patterning the second photoresist layer, etching the magnetic layer through the patterned second photoresist layer, and removing the second photoresist layer.
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