Is a
Patent attributes
Patent Applicant
Patent Jurisdiction
Patent Number
Date of Patent
October 29, 2019
Patent Application Number
15864330
Date Filed
January 8, 2018
Patent Citations Received
Patent Primary Examiner
Patent abstract
Disclosed is a semiconductor device. The semiconductor device includes a substrate, channel semiconductor patterns vertically stacked and spaced apart from each other on the substrate, a gate electrode running across the channel semiconductor patterns, source/drain regions at opposite sides of the gate electrode, the source/drain regions being connected to the channel semiconductor patterns, and air gaps between the substrate and bottom surfaces of the source/drain regions so that the bottom surfaces of the source/drain regions do not contact the substrate.
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