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US Patent 10480073 Rotating semi-batch ALD device

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
August 21, 2015
Date of Patent
November 19, 2019
Patent Application Number
14831884
Patent Citations
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US Patent 10066297 Tiled showerhead for a semiconductor chemical vapor deposition reactor
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US Patent 10196741 Wafer placement and gap control optimization through in situ feedback
Patent Citations Received
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US Patent 11837445 Substrate processing device and substrate processing method
0
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US Patent 11598004 Lid assembly apparatus and methods for substrate processing chambers
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US Patent 11339472 Substrate processing apparatus
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US Patent 11421321 Apparatuses for thin film deposition
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US Patent 10900122 Apparatus for semiconductor wafer processing
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10480073
Patent Primary Examiner
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Charlee J. C. Bennett

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