Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Karthik Janakiraman0
Hari K. Ponnekanti0
Juan Carlos Rocha-Alvarez0
Date of Patent
November 19, 2019
0Patent Application Number
156974920
Date Filed
September 7, 2017
0Patent Citations
Patent Primary Examiner
Patent abstract
A substrate transport system is disclosed and includes a chamber having an interior wall, a planar motor disposed on the interior wall, and a substrate carrier magnetically coupled to the planar motor. The substrate carrier comprises a base and a substrate supporting surface coupled to a support member extending from the base in a cantilevered orientation.
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