Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Richard H. Gould0
Christopher William Burkhart0
Mark K. Tan0
Richard M. Blank0
Date of Patent
November 19, 2019
0Patent Application Number
161323260
Date Filed
September 14, 2018
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A system for mounting vacuum robot arms in horizontally elongate vacuum transfer modules is provided. The system provides mechanical isolation to the vacuum robot arm against deflections in the housing of the vacuum transfer module due to depressurization of the interior of the vacuum transfer module while the exterior of the vacuum transfer module is subjected to atmospheric pressure. Such systems may prevent undesirable, larger displacements of the end effector of such vacuum robot arms due to the deflection.
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