Patent attributes
An RF source impedance is raised with an impedance step-up transformer and a matching circuit is coupled between the stepped up impedance RF source and a RF load wherein the RF load impedance can be matched to the stepped up RF source impedance with a matching network comprising a variable capacitor and a variable inductor having single match solutions for all frequencies and impedances so long as the RF load impedance is less that the stepped up RF source impedance. A RF attenuator may be used to provide a better impedance load to the RF source during match determination and adjustment of the variable capacitor and variable inductor. Automatic impedance matching measures the RF source frequency and RF load voltage, current and phase to determine a single match solution for a capacitive value of the variable capacitor and an inductive value for the variable inductor.
