US Patent 10488430 Stiction detection and recovery in a micro-electro-mechanical system device

A method for testing a multi-axis micro-electro-mechanical system(MEMS) acceleration sensor includes applying a first voltage to a first-axis excitation plate to move a first proof mass in contact with a proof mass stop. A second voltage is applied to a second-axis excitation plate while maintaining the first voltage to the first-axis excitation plate, to move the first proof mass in a direction orthogonal to the first-axis while in contact with the proof mass stop A reference voltage is applied to the first-axis excitation plate and a determination is made whether an output voltage of the MEMS device is higher than a threshold voltage. If the output voltage is higher than the threshold voltage ten stiction is detected and stiction recovery may therefore be preformed.