Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
November 26, 2019
Patent Application Number
16115047
Date Filed
August 28, 2018
Patent Citations Received
Patent Primary Examiner
Patent abstract
A target formed on a substrate, the target having: an alignment structure; and a metrology structure; wherein the alignment structure comprises structures that are arranged to generate a beat pattern when the alignment structure is illuminated with source radiation. Advantageously, when the target is illuminated, the beat pattern that appears in an image of the target allows the target to be easily identified using a pattern recognition technique.
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