US Patent 10490392 Focus ring replacement method and plasma processing system
Patent 10490392 was granted and assigned to Tokyo Electron on November, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 6, 2017
0
Date of Patent
November 26, 2019
0
Patent Applicant
Patent Application Number
15642517
0
Patent Citations Received
Patent Inventor Names
Shigeru Ishizawa
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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