Patent 10507088 was granted and assigned to Align Technology on December, 2019 by the United States Patent and Trademark Office.
Embodiments are directed to an imaging apparatus, which in an embodiment includes a light source to provide light, optics, a translation mechanism and a detector. The optics include focusing optics to perform focusing of the light onto a non-flat focal surface and to direct the light toward a three dimensional object. The translation mechanism adjusts a location of at least one lens of the focusing optics to displace the non-flat focal surface. The detector measures intensities of returning light that is reflected off of the three dimensional object, wherein the intensities of the returning light are measured for a plurality of locations of the at least one lens for determination of positions of a plurality of points of the three dimensional object. Detected positions of one or more of the plurality of points are adjusted to compensate for the non-flat focal surface.