Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ming-Chyi Liu0
Yung-Chang Chang0
Chung-Yen Chou0
Shih-Chang Liu0
Date of Patent
December 17, 2019
0Patent Application Number
158755770
Date Filed
January 19, 2018
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor structure is disclosed. The semiconductor structure includes: a substrate and a gate element over the substrate. The gate element includes: a gate dielectric layer over the substrate; a gate electrode over the gate dielectric layer; and a waveguide passing through the gate electrode from a top surface of the gate electrode to a bottom surface of the gate electrode. A manufacturing method of the same is also disclosed.
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