US Patent 10510590 Low resistivity films containing molybdenum
Patent 10510590 was granted and assigned to Lam Research on December, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 9, 2018
Date of Patent
December 17, 2019
Patent Applicant
Patent Application Number
15948143
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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