US Patent 10514614 Process variability aware adaptive inspection and metrology
Is a
Date Filed
January 20, 2016
0
Date of Patent
December 24, 2019
0
Patent Application Number
15546592
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Patent Inventor Names
Stefan Hunsche
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Vivek Kumar Jain
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Venugopal Vellanki
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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