Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chen-Hua Yu0
Jing-Cheng Lin0
Po-Hao Tsai0
Date of Patent
December 24, 2019
0Patent Application Number
159074730
Date Filed
February 28, 2018
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method includes dispensing sacrificial region over a carrier, and forming a metal post over the carrier. The metal post overlaps at least a portion of the sacrificial region. The method further includes encapsulating the metal post and the sacrificial region in an encapsulating material, demounting the metal post, the sacrificial region, and the encapsulating material from the carrier, and removing at least a portion of the sacrificial region to form a recess extending from a surface level of the encapsulating material into the encapsulating material.
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