Patent attributes
Microfluidic circuit elements, such as a microvalve, micropump or microvent, formed of a microcavity divided by a diaphragm web into a first subcavity bounded by a first internal wall and a second subcavity bounded by a second internal wall, where the diaphragm web is characterized as a thin film having a first state contacting the first internal wall and a second state contacting the second internal wall and exhibiting essentially no elasticity in moving between the first state and the second state, the thin film web having been stretched beyond its yield point before or during use are provided. The disclosed elements enable faster and more efficient cycling of the diaphragm in the microcavity and increases the diaphragm surface area. In a preferred embodiment, the microfluidic circuit element is pneumatically driven and controls the motion of fluids in a microassay device.