Patent attributes
The purpose of this invention is obtaining a gyroscope with high Q factor, high as fabricated symmetry and reducing the quadrature error. One aspect of this invention is a gyroscope including a semiconductor chip. This semiconductor chip comprising a substrate, first mass, second mass, connection unit. The first mass can move in any direction of a X-Y plane. The second mass can move in any direction of the X-Y plane. The connection unit located between the first mass and the second mass mechanically connects the first mass and the second mass. The connection unit comprises anchor fixed to the substrate, first shuttle located between the anchor and the first mass, second shuttle located between the anchor and the second mass, first beam connecting the anchor and the first shuttle, second beam connecting the anchor and the second shuttle, third beam connecting the first mass and the first shuttle, fourth beam connecting the second mass and the second shuttle, and fifth beam connecting the first shuttle and the second shuttle. The anchor is located between the first shuttle and the second shuttle.
