US Patent 10527832 Imaging optical unit and projection exposure apparatus including same
Patent 10527832 was granted and assigned to Carl Zeiss SMT on January, 2020 by the United States Patent and Trademark Office.
All edits
An imaging optical unit for projection lithography has a plurality of mirrors for imaging an object field into an image field with imaging light guided along a path from the object field to the image field. The penultimate mirror in the path has no passage opening to pass the imaging light. The imaging optical unit has a stop to predefine an outer marginal contour of a pupil of the imaging optical unit. The stop is between the penultimate and last mirrors in the path. The imaging optical unit can have exactly one stop for predefining at least one section of the outer pupil marginal contour. An entrance pupil of the imaging optical unit can be upstream of the object field. The imaging optical unit can be well defined regarding its pupil and exhibit desirable properties for projection lithography.
US Patent 10527832 Imaging optical unit and projection exposure apparatus including same
Find more entities like US Patent 10527832 Imaging optical unit and projection exposure apparatus including same
