Is a
Patent attributes
Patent Applicant
Patent Jurisdiction
Patent Number
Date of Patent
January 7, 2020
Patent Application Number
15900283
Date Filed
February 20, 2018
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
A substrate processing apparatus includes an accommodating chamber including a loading shelf configured to load a storage vessel that accommodates a substrate; a transfer mechanism installed in a ceiling part of the accommodating chamber and configured to hold an upper portion of the storage vessel and transfer the storage vessel; and a port configured to load and unload the storage vessel to and from the accommodating chamber.
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