US Patent 10529663 Copper interconnect with filled void

Voids within metal deposited on interconnect structures are filled with cobalt or a cobalt compound to enhance electromigration performance. A reflow process to enlarge interconnect metal grain size is performed prior to filling the voids. An interconnect metal microstructure beneath the filled voids includes grain boundaries extending to the bottom portions of the voids. A coating of manganese atoms provides resistance to electromigration. Copper interconnects having fine dimensions and improved reliability are obtained.