Patent attributes
Embodiments of lift pin holders are disclosed herein. In some embodiments, a lift pin holder includes a housing member having an upper portion and a lower portion, wherein the upper portion includes an annular wall defining a central space; a support member disposed at least partially within the central space and having a base and an upwardly protruding portion configured to support a lift pin; a first gripper disposed atop the support member and having a first plurality of prongs protruding upward from a body of the first gripper and configured to grip the lift pin; and a second gripper disposed atop the base of the support member and having a second plurality of prongs protruding upward from a body of the second gripper and are configured to grip the lift pin, wherein the first gripper is disposed within the third central opening.