US Patent 10546733 One-piece process kit shield
Patent 10546733 was granted and assigned to Applied Materials on January, 2020 by the United States Patent and Trademark Office.
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Patent abstract
Embodiments of process kit shields and process chambers incorporating same are provided herein. In some embodiments, a one-piece process kit shield includes a cylindrical body having an upper portion and a lower portion; a heat transfer channel extending through the upper portion; and a cover ring section extending radially inward from the lower portion.
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Patent Inventor Names
Kirankumar Savandaiah0
Ruxiao An0
Ryan Hanson0
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Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
105467330
Date of Patent
January 28, 2020
0Patent Application Number
149608900
Date Filed
December 7, 2015
0Patent Primary Examiner
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US Patent 10546733 One-piece process kit shield
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10546733
Date of patent
January 28, 2020
Patent application number
14960890
Date Filed
December 7, 2015
Patent primary examiner
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