Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chen-Wei Ku0
Jung-Hua Chen0
Hong-Wen Liao0
Date of Patent
February 4, 2020
0Patent Application Number
149450300
Date Filed
November 18, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A purge load port which is a load port devised with a purging plate and a purging module. The purging plate has inlet nozzles, outlet nozzles and recognizer; and the purging module has an inlet opening, an outlet opening, at least a temperature and humidity sensor, at least a flow meter and at least a pressure sensor. It makes the load port incapable of purging to provide the purging techniques after being devised with purging plate and purging modules, which solves the problem of controlling the cleanness by conventional load port, and thus effectively improves the yield of wafers in microchip fabrication.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.