Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tsutomu Miki0
Kenichi Otsuka0
Syunichi Ono0
Date of Patent
February 4, 2020
0Patent Application Number
152528940
Date Filed
August 31, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A control device of a semiconductor manufacturing apparatus includes a processor and a memory connected to the processor and storing instructions executable by the processor. The instructions collect a sound of processing a substrate by the semiconductor manufacturing apparatus. The instructions calculate a difference of a power spectrum of the processing sound between a first point of time and a second point of time. The instructions determine a change point of processing of the substrate based on the difference.
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