Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
James Swallow0
John Taddei0
William Gilbert Breingan0
Date of Patent
February 11, 2020
0Patent Application Number
156705780
Date Filed
August 7, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A two-level tape frame rinse assembly is configured for grasping the substrate so as to create a gap between the substrate and a backside support plate that allows the backside of the wafer to be rinsed and spun dry after rinsing.
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