Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yew Kwang Low0
Date of Patent
February 25, 2020
0Patent Application Number
158237260
Date Filed
November 28, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An illustrative example MEMS device includes a base and a plurality of mirror surfaces supported on the base. The plurality of mirror surfaces are respectively in a fixed position relative to the base. The plurality of mirror surfaces are at respective angles relative to a reference. The respective angles of at least some of the mirror surfaces are different from the respective angles of at least some others of the mirror surfaces.
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