US Patent 10571809 Half tone scheme for maskless lithography
Patent 10571809 was granted and assigned to Applied Materials on February, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 19, 2019
0
Date of Patent
February 25, 2020
0
Patent Applicant
Patent Application Number
16279875
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Patent Citations Received
Patent Inventor Names
Christopher Dennis Bencher
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Joseph R. Johnson
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Thomas L. Laidig
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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