Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Juline Shoeb0
Ying Wu0
Alex Paterson0
Date of Patent
February 25, 2020
Patent Application Number
16275008
Date Filed
February 13, 2019
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
Systems and methods for multi-level pulsing of a parameter and multi-level pulsing of a frequency of a radio frequency (RF) signal are described. The parameter is pulsed from a low level to a high level while the frequency is pulsed from a low level to a high level. The parameter and the frequency are simultaneously pulsed to increase a rate of processing a wafer, to increase mask selectivity, and to reduce angular spread of ions within a plasma chamber.
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