Patent attributes
A light emitting diode (LED) is manufactured using a process in which hydrogen diffuses out of a p-doped semiconductor layer via an exposed side wall of the p-doped semiconductor layer. The process includes forming a light generation layer on a base semiconductor layer and forming the p-doped semiconductor layer on the light generation layer. A tunnel junction layer is formed on the p-doped semiconductor layer and a contact layer is formed on the junction layer. The process also includes etching through at least the contact layer, the tunnel junction layer, and the p-doped semiconductor layer to expose the side wall of the p-doped semiconductor layer and enabling hydrogen to diffuse out of the p-doped semiconductor layer at least partially through the exposed side wall.
