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US Patent 10580546 Radiation system
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Patent
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Date Filed
February 16, 2016
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Date of Patent
March 3, 2020
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Patent Application Number
15549132
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Patent Citations
US Patent 10001713 Lithographic apparatus and method
Patent Citations Received
US Patent 10989601 Beam focusing and reflective optics
Patent Inventor Names
Rilpho Ludovicus Donker
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Gosse Charles De Vries
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Han-Kwang Nienhuys
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10580546
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Patent Primary Examiner
Wyatt A Stoffa
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