US Patent 10580628 Differentially pumped reactive gas injector
Patent 10580628 was granted and assigned to Lam Research on March, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 25, 2017
Date of Patent
March 3, 2020
Patent Applicant
Patent Application Number
15793506
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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