US Patent 10589420 Hand device

A hand device includes: a first hand fixed to a robot arm; a second hand that has a workpiece stage on which a workpiece is placed and that is coupled to the first hand; a positioning mechanism that positions the second hand relative to the first hand when the second hand is to be coupled to the first hand; and a coupling mechanism that couples the second hand having been positioned by the positioning mechanism to the first hand, and uncouples the second hand from the first hand, wherein the hand device is configured to clamp the workpiece between the first hand and the second hand by moving at least a part of the first hand toward the second hand.