Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoel Feler0
Noam Sapiens0
Paykin Irina0
Vladimir Levinski0
Alexander Svizher0
Barak Bringoltz0
Daniel Kandel0
Guy Ben Dov0
...
Date of Patent
March 17, 2020
Patent Application Number
15092329
Date Filed
April 6, 2016
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
Metrology methods, systems and targets are provided, which implement a side by side paradigm. Adjacent cells with periodic structures are used to extract the overlay error, e.g., by introducing controllable phase shifts or image shifts which enable algorithmic computation of the overlay. The periodic structures are designed to exhibit a rotational symmetry to support the computation and reduce errors.
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