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US Patent 10607816 Showerhead having a detachable high resistivity gas distribution plate

Patent 10607816 was granted and assigned to Applied Materials on March, 2020 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Patent Applicant

Applied Materials

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

10607816

Date of Patent

March 31, 2020

Patent Application Number

15909118

Date Filed

March 1, 2018

Patent Citations

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US Patent 10373810 Showerhead having an extended detachable gas distribution plate

Patent Citations Received

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US Patent 11332828 Gas distribution assembly mounting for fragile plates to prevent breakage

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US Patent 10790120 Showerhead having a detachable high resistivity gas distribution plate

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US Patent 10954595 High power showerhead with recursive gas flow distribution

Patent Primary Examiner

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Rudy Zervigon

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