US Patent 10607817 Thermal repeatability and in-situ showerhead temperature monitoring
Patent 10607817 was granted and assigned to Applied Materials on March, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 13, 2017
0
Date of Patent
March 31, 2020
0
Patent Applicant
Patent Application Number
15405758
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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