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US Patent 10615052 Method of manufacturing semiconductor device

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Date of Patent

April 7, 2020

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Patent Application Number

159910800

Date Filed

May 29, 2018

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Patent Citations

US Patent 10096623 Thin film transistor, method for manufacturing the same, and semiconductor device

US Patent 10084072 Semiconductor device and method for manufacturing the same

US Patent 10002775 Method of manufacturing semiconductor device

Patent Primary Examiner

Mary A Wilczewski

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