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US Patent 10620135 Identifying a source of nuisance defects on a wafer

Patent 10620135 was granted and assigned to KLA-Tencor on April, 2020 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 11983865 Deep generative model-based alignment for semiconductor applications
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US Patent 11790515 Detecting defects in semiconductor specimens using weak labeling
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=1062013500
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US Patent 11379972 Detecting defects in semiconductor specimens using weak labeling
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 US Patent 10620135 Identifying a source of nuisance defects on a wafer

Infobox
Is a
Patent
Patent
Patent applicant
KLA-Tencor
KLA-Tencor
Current assignee
KLA-Tencor
KLA-Tencor
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10620135
Date of patent
April 14, 2020
Patent application number
15947730
Date Filed
April 6, 2018
Patent primary examiner
‌
Soo Jin Park

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