US Patent 10629417 Sputter ion pump with penning-trap current sensor
Patent 10629417 was granted and assigned to ColdQuanta Inc on April, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 1, 2016
Date of Patent
April 21, 2020
Patent Applicant
Patent Application Number
15366635
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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