US Patent 10638593 Matchless plasma source for semiconductor wafer fabrication
Patent 10638593 was granted and assigned to Lam Research on April, 2020 by the United States Patent and Trademark Office.
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Patent Number
106385930
Date of Patent
April 28, 2020
0Patent Application Number
163561800
Date Filed
March 18, 2019
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US Patent 10638593 Matchless plasma source for semiconductor wafer fabrication
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10638593
Date of patent
April 28, 2020
Patent application number
16356180
Date Filed
March 18, 2019
Patent primary examiner
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