US Patent 10643865 Substrate cleaning apparatus
Patent 10643865 was granted and assigned to Tokyo Electron on May, 2020 by the United States Patent and Trademark Office.
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Patent Number
106438650
Date of Patent
May 5, 2020
0Patent Application Number
154528480
Date Filed
March 8, 2017
0Official Website
Patent Primary Examiner
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US Patent 10643865 Substrate cleaning apparatus
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10643865
Date of patent
May 5, 2020
Patent application number
15452848
Date Filed
March 8, 2017
Patent primary examiner
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