US Patent 10665419 Intelligent pre-scan in scanning transmission charged particle microscopy
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Patent Number
106654190
Date of Patent
May 26, 2020
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162820210
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February 21, 2019
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US Patent 10665419 Intelligent pre-scan in scanning transmission charged particle microscopy
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10665419
Date of patent
May 26, 2020
Patent application number
16282021
Date Filed
February 21, 2019
Patent citations
Patent primary examiner
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