US Patent 10665449 Integrate rinse module in hybrid bonding platform
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Patent Number
106654490
Date of Patent
May 26, 2020
0Patent Application Number
152693460
Date Filed
September 19, 2016
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US Patent 10665449 Integrate rinse module in hybrid bonding platform
Infobox
Is a
Patent jurisdiction
Patent number
10665449
Date of patent
May 26, 2020
Patent application number
15269346
Date Filed
September 19, 2016
Patent primary examiner
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