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US Patent 10676349 MEMS resonator
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Patent
Date Filed
August 14, 2017
Date of Patent
June 9, 2020
Patent Applicant
SiTime
Patent Application Number
15676890
Patent Citations Received
US Patent 12103845 Micro-electromechanical system and method for fabricating MEMS having protection wall
0
US Patent 11509277 Piezoelectric single crystal silicon carbide microelectromechanical resonators
US Patent 11939215 Microelectromechanical structure including a functional element situated in a cavity of the microelectromechanical structure
0
US Patent 11975965 MEMS resonator
0
US Patent 11469732 Method of fabricating a SiC resonator
US Patent 11584642 MEMS resonator
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
10676349
Patent Primary Examiner
Andres Munoz
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