US Patent 10684407 Reactivity enhancement in ion beam etcher
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Patent Number
106844070
Date of Patent
June 16, 2020
0Patent Application Number
160016940
Date Filed
June 6, 2018
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US Patent 10684407 Reactivity enhancement in ion beam etcher
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10684407
Date of patent
June 16, 2020
Patent application number
16001694
Date Filed
June 6, 2018
Patent citations
Patent primary examiner
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