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US Patent 10692925 Dielectric fill for memory pillar elements
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Patent
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Date Filed
October 12, 2018
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Date of Patent
June 23, 2020
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Patent Application Number
16159220
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Patent Citations
US Patent 10043657 Plasma assisted atomic layer deposition metal oxide for patterning applications
Patent Citations Received
US Patent 11955152 Dielectric fill for tight pitch MRAM pillar array
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US Patent 11937514 High-density memory devices using oxide gap fill
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10692925
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Patent Primary Examiner
Tong-Ho Kim
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