US Patent 10704715 Vacuum pumping device, vacuum pump, and vacuum valve
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107047150
Date of Patent
July 7, 2020
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159781510
Date Filed
May 13, 2018
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US Patent 10704715 Vacuum pumping device, vacuum pump, and vacuum valve
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10704715
Date of patent
July 7, 2020
Patent application number
15978151
Date Filed
May 13, 2018
Patent citations
Patent primary examiner
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